Media Storage Type : 32 GB USB Stick
NPTEL Subject Matter Expert : Dr. Nandita Dasgupta
NPTEL Co-ordinating Institute : IIT Madras
NPTEL Lecture Count : 40
NPTEL Course Size : 7.1 GB
NPTEL PDF Text Transcription : Available and Included
NPTEL Subtitle Transcription : Available and Included (SRT)
Lecture Titles:
Lecture 1 - Introduction on VLSI Design
Lecture 2 - Bipolar Junction Transistor Fabrication
Lecture 3 - MOSFET Fabrication for IC
Lecture 4 - Crystal Structure of Si
Lecture 5 - Crystal Structure (Continued.)
Lecture 6 - Defects in Crystal + Crystal growth
Lecture 7 - Crystal growth Contd + Epitaxy I
Lecture 8 - Epitaxy II - Vapour phase Epitaxy
Lecture 9 - Epitaxy III - Doping during Epitaxy
Lecture 10 - Molecular beam Epitaxy
Lecture 11 - Oxidation I - Kinetics of Oxidation
Lecture 12 - Oxidation II - Oxidation rate constants
Lecture 13 - Oxidation III - Dopant Redistribution
Lecture 14 - Oxidation IV - Oxide Charges
Lecture 15 - Diffusion I - Theory of Diffusion
Lecture 16 - Diffusion II - Infinite Source
Lecture 17 - Diffusion III - Actual Doping Profiles
Lecture 18 - Diffusion IV - Diffusion Systems
Lecture 19 - Ion - Implantation Process
Lecture 20 - Ion - Implantation Process
Lecture 21 - Annealing of Damages
Lecture 22 - Masking during Implantation
Lecture 23 - Lithography - I
Lecture 24 - Lithography - II
Lecture 25 - Wet Chemical Etching
Lecture 26 - Dry Etching
Lecture 27 - Plasma Etching Systems
Lecture 28 - Etching of Si,Sio2,SiN and other materials
Lecture 29 - Plasma Deposition Process
Lecture 30 - Metallization - I
Lecture 31 - Problems in Aluminium Metal contacts
Lecture 32 - IC BJT - From junction isolation to LOCOS
Lecture 33 - Problems in LOCOS + Trench isolation
Lecture 34 - More about BJT Fabrication and Realization
Lecture 35 - Circuits + Transistors in ECL Circuits
Lecture 36 - MOSFET I - Metal gate vs. Self-aligned Poly-gate
Lecture 37 - MOSFET II Tailoring of Device Parameters
Lecture 38 - CMOS Technology
Lecture 39 - Latch - up in CMOS
Lecture 40 - BICMOS Technology