NOC:A brief Introduction of Micro-Sensors (USB)

Media Storage Type : 32 GB USB Stick

NPTEL Subject Matter Expert : Prof. Santanu Talukder

NPTEL Co-ordinating Institute : IIT Madras

NPTEL Lecture Count : 23

NPTEL Course Size : 22 GB

NPTEL PDF Text Transcription : Available and Included

NPTEL Subtitle Transcription : Available and Included (SRT)

Lecture Titles:

Lecture 1 - Introduction to Microscale Sensors or MEMS
Lecture 2 - Scaling effect
Lecture 3 - Some Simple Mechanics
Lecture 4 - Basic Mechanics - Part 1
Lecture 5 - Basic Mechanics - Part 2
Lecture 6 - Basic Mechanics - Part 3
Lecture 7 - Electrostatics
Lecture 8 - Electrostatic force
Lecture 9 - Coupled electromechanics
Lecture 10 - Stiction
Lecture 11 - Si crystal structure
Lecture 12 - Si etching
Lecture 13 - KOH etching
Lecture 14 - TMAH etching
Lecture 15 - Deposition and Lithography
Lecture 16 - Lithography
Lecture 17 - Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing
Lecture 18 - Pressure Sensor - II
Lecture 19 - Pressure Sensor - III
Lecture 20 - Accelerometer - I
Lecture 21 - Accelerometer - II
Lecture 22 - Assignment 1
Lecture 23 - Assignment 2