Introduction to Microelectronic Fabrication Processes (DVD)

Media Storage Type : DVD-ROM

NPTEL Course Name : Introduction to Microelectronic Fabrication Processes

NPTEL Subject Matter Expert : Dr. S. Ramanathan

NPTEL Co-ordinating Institute : IIT Madras

NPTEL Lecture Count : 41

Lecture Titles:

Lecture 1 - Introduction
Lecture 2 - Lithography - Layout and Mask
Lecture 3 - Lithography - Basic process
Lecture 4 - Lithography - Basic process (Continued...)
Lecture 5 - Advanced lithography
Lecture 6 - Advanced lithography-II
Lecture 7 - Lithography-production details, next generation lithography
Lecture 8 - Physical Vapor Deposition
Lecture 9 - Physical Vapor Deposition (Continued...)
Lecture 10 - Physical Vapor Deposition and Chemical Vapor Deposition
Lecture 11 - Chemical Vapor Deposition (Continued...)
Lecture 12 - Chemical Vapor Deposition, Electrochemical Deposition
Lecture 13 - Wet etching
Lecture 14 - Dry etching
Lecture 15 - Dry etching Continued
Lecture 16 - Chemical Mechanical Planarization (CMP)
Lecture 17 - CMP continued
Lecture 18 - Band Structure
Lecture 19 - Diodes
Lecture 20 - MOS transistor structure and operation
Lecture 21 - MOS transistor (Continued...)
Lecture 22 - MOS transistor Processing
Lecture 23 - MOS transistor fabrication and isolation
Lecture 24 - Diffusion basics and Constant source diffusion
Lecture 25 - Limited source diffusion
Lecture 26 - Diffusion- production issues
Lecture 27 - Ion implantation - basics
Lecture 28 - Ion implantation ï¾– non idealities
Lecture 29 - Oxidation - basics
Lecture 30 - Oxidation - Modeling
Lecture 31 - BEOL issues and Aluminum metallization
Lecture 32 - Electromigration and copper metallization
Lecture 33 - Testing Basics
Lecture 34 - FBM
Lecture 35 - Yield and defects - basics
Lecture 36 - Yield models and data analysis
Lecture 37 - Yield analysis
Lecture 38 - Yield analysis (Continued...)
Lecture 39 - Scanning electron microscopy
Lecture 40 - SEM (Continued) and atomic force microscopy
Lecture 41 - AFM (Continued) and Ellipsometry