NPTEL : MEMS and Microsystems (Electronics and Communication Engineering)

Co-ordinators : Prof. Santiram Kal


Lecture 1 - Introduction to MEMS & Microsystems

Lecture 2 - Introduction to Microsensors

Lecture 3 - Evaluation of MEMS, Microsensors, Market Survey

Lecture 4 - Application of MEMS

Lecture 5 - MEMS Materials

Lecture 6 - MEMS Materials Properties

Lecture 7 - MEMS Materials Properties (Continued...)

Lecture 8 - Microelectronic Technology for MEMS - II

Lecture 9 - Microelectronic Technology for MEMS - III

Lecture 10 - Micromachining Technology for MEMS

Lecture 11 - Micromachining Process

Lecture 12 - Etch Stop Techniques and Microstructure

Lecture 13 - Surface and Quartz Micromachining

Lecture 14 - Fabrication of Micromachined Microstructure

Lecture 15 - Microstereolithography

Lecture 16 - MEMS Microsensors Thermal

Lecture 17 - Micromachined Microsensors Mechanical

Lecture 18 - MEMS Pressure and Flow Sensor

Lecture 19 - Micromachined Flow Sensors

Lecture 20 - MEMS Inertial Sensors

Lecture 21 - Micromachined Microaccelerometers for MEMS

Lecture 22 - MEMS Accelerometers for Avionics

Lecture 23 - Temperature Drift and Damping Analysis

Lecture 24 - Piezoresistive Accelerometer Technology

Lecture 25 - MEMS Capacitive Accelerometer

Lecture 26 - MEMS Capacitive Accelerometer Process

Lecture 27 - MEMS Gyro Sensor

Lecture 28 - MEMS for Space Application

Lecture 29 - Polymer MEMS & Carbon Nano Tubes CNT

Lecture 30 - Wafer Bonding & Packaging of MEMS

Lecture 31 - Interface Electronics for MEMS

Lecture 32 - MEMS for Biomedical Applications (Bio-MEMS)