NPTEL : Fabrication of Silicon VLSI Circuits using the MOS technology (Electrical Engineering)

Co-ordinators : Prof. A.N. Chandorkar


Lecture 1 - Introduction Micro to Nano A Journey into Intergrated Circuit Technology

Lecture 2 - Introduction Micro to Nano A Journey into Intergrated Circuit Technology

Lecture 3 - Crystal Properties and Silico Growth

Lecture 4 - Crystal Properties and Silico Growth (Continued...)

Lecture 5 - IC Fab Labs and Fabrication of IC

Lecture 6 - Diffusion

Lecture 7 - Diffusion (Continued...)

Lecture 8 - Solid State Diffusion

Lecture 9 - Solid State Diffusion (Continued...)

Lecture 10 - Solid State Diffusion (Continued...)

Lecture 11 - Thermal Oxidation of Silicons

Lecture 12 - Thermal Oxidation of Silicons

Lecture 13 - Thermal Oxidation of Silicons

Lecture 14 - Thermal Oxidation of Silicons (Continued...)

Lecture 15 - Thermal Oxidation of Silicons (Continued...)

Lecture 16 - Lithography

Lecture 17 - Lithography

Lecture 18 - Lithography

Lecture 19 - ION Implantation

Lecture 20 - ION Implantation

Lecture 21 - ION Implantation and Silicon IC Processing Flow for CMOS Technology

Lecture 22 - ION Implantation and Silicon IC Processing Flow for CMOS Technology

Lecture 23 - Silicon IC Processing Flow for CMOS Technology

Lecture 24 - Thin Film Deposition

Lecture 25 - Thin Film Deposition

Lecture 26 - Thin Film Deposition

Lecture 27 - Thin Film Deposition and Etching in VLSI Processing

Lecture 28 - Etching in VLSI Processing and Back -End Technology